Publications with the keyword "morphological characterization"
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C. MacChi,
J. Bürgi,
J. G. Molleja,
S. Mariazzi,
M. Piccoli,
E. Bemporad,
J. Feugeas,
R. Brusa,
et al.
Depth profiling and morphological characterization of AlN thin films deposited on Si substrates using a reactive sputter magnetron
EPJ Applied Physics (cited By 3),
67(2),
2014
defects
deposition
depth profiling
imaging techniques
magnetrons
positron annihilation spectroscopy
reactive sputtering
silicon
substrates
thin films
x ray diffraction
x ray spectroscopy
aluminum nitride thin films
deposition time
doppler broadening spectroscopy
energy dispersive x ray spectroscopy
film-substrate interfaces
morphological characterization
open-volume defects
substrate interface
interfaces (materials)
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DOI,
RIS,
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